Cleanroom transport and loading system for large optical products


A major player in the semi-conductor industry required 2 cleanroom compatible transport and loading jigs to carry two different optical products through the cleanroom, into and out of measurement machines and on and off an assembly station via a rail system. The rails are the universal machine interface with dedicated rail height and distance for each product of the customer.

Solution (approach)

The final solution consists of a pallet for each product, the rail system, the dedicated wheel package, a drive and brake system and the controlling and steering components. These systems will be loaded by rails and cranes as well as being picked up by a robotic transport vehicle.

What & how we solved it

For these systems multiple concepts have been developed focusing on the different functions:

  • A supporting structure to handle loads of 7 and 15 tons and accelerations in multiple directions while staying within weight limits without deformations
  • A rail to wheel system, handling the same loads within a restricted volume and compatible with vacuum, not allowing any greasing
  • Automated gripper to attach to the products and handle a 10kN load in 2 directions
  • Actuators, sensors and safety systems to allow for a user friendly and safe system

After concept selection, the systems have been engineered up to final production drawings and documentation. This was followed by final production, validation and installation and commission at customer side.

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